THE DEVELOPMENT OF A SOURCE OF GASEOUS IONS’ RIBBON BEAMS FOR MODIFICATION OF ROLL MATERIALS D.R.

Abstract

The operating principle, design, and test results of a source of gaseous ions’
ribbon beam are described. The source was based on non-self-sustained gas glow
discharge of low pressure supported by emission of grid stabilized plasma cathode.
Beams of gaseous ions (N2, Ar, O2 and their mixes) were generated in
pulse-periodic mode (5-1000 Hz, 0.25–0.5 ms). Beams cross section made
650×80 mm2. Ions energy was adjusted within the range 15–40 keV, the average
beam current being 0.5–200 mА, the heterogeneity of current density distribution
along the large axis of beam cross-section being ~10%. The source operated under
pressures 0.03–0.07 Pа provided by diffusion pump. High reliability and large
resource of the ion source are caused by the use of plasma cathode based on glow
discharge in its discharge system.