The Method for Calculating of Single-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer
Abstract
The method for calculating of single-axis micro-opto-elctro-mechanical (MOEM) angular velocity transducer based on the optical tunneling effect (OTE) is conceived. This paper is created the algorithm and the software development that allows calculating transducer’s basic parameters in providing of defined technical requirements.
Published
2018-05-23
Issue
Section
Instrument Engineering, Metrology and Information and Measuring Devices and Systems